Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus
AssigneeShowa Shinku Co., Ltd.
InventorsYusuke Osada, Tadahisa Shiono, Yutaka Yabe, Makoto Ito
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Abstract
An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114, causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids 116a, 116b having a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids 116a, 116b is independently controlled by independently setting accelerator control switches 121a, 121b on or off to change the potential of that of the separated accelerator grids 116a, 116b which corresponds to an ion beam to be disabled.
Claims14
A charged particle beam apparatus for irradiating charged particles, comprising:
- charged particle generating means that generates charged particles;
- an accelerator grid having multi-separated accelerator grids that draw the charged particles generated by the charged particle generating means and output charged particle beams;
- a screen grid provided between the charged particle generating means and the accelerator grid;
- and
- control means that controls each potential of the multi-separated accelerator grids to thereby independently control the respective charged particle beams.
A method for controlling charged particles, comprising:
- generating plasma in a predetermined container;
- disposing a plurality of accelerator grids adjacent to the plasma;
- applying a voltage to each accelerator grid to form a voltage gradient in a direction of drawing charged particles, and ejecting the charged particles in the plasma;
- and
- independently controlling voltages to the plurality of accelerator grids to thereby control a current density distribution of the ejected charged particles.
Dependencies are inferred from the claim text.