Method and apparatus for rapid imprint lithography
OwnerWei Zhanginventor
Life of this patent
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Abstract
In accordance with the invention, a mold for imprinting a patterned region by imprint lithography is provided with a peripheral groove around the patterned region. The groove is connected, as by channels through the mold, to a switchable source for gas removal to prevent bubbles and for the application of pressurized gas to separate the mold and substrate. In use, the mold is disposed adjacent the moldable surface and gas is withdrawn from the patterned region through the groove as the mold is pressed toward and into the moldable surface. At or near the end of the imprinting, the process is switched from removal of gas to the application of pressurized gas. The pressurized gas passes through the groove and separates or facilitates separation of the mold and the moldable surface.
Claims25
A method of imprint lithography comprising the steps of:
- providing a substrate having a moldable surface;
- providing a mold having a molding surface for imprinting onto the moldable surface, the molding surface substantially surrounded by a surface groove for conducting fluid;
- disposing the mold adjacent the substrate with the molding surface adjacent the moldable surface;
- pressing the molding surface against the moldable surface to imprint the moldable surface;
- hardening the moldable surface;
- and
- applying pressurized fluid through the groove to facilitate separation of the mold from the imprinted moldable surface.
Apparatus for imprinting a molding surface on a substrate having a moldable surface comprising in operative relationship:
- a mold having a molding surface, the molding surface substantially surrounded by a surface groove for conducting fluid;
- a positioner for placing the mold adjacent the substrate with the molding surface adjacent the moldable surface;
- pressing apparatus for pressing the mold against the substrate;
- and
- a source of pressurized fluid switchably connected to introduce pressurized fluid through the surface groove to facilitate separation of the mold from the imprinted substrate.
Dependencies are inferred from the claim text.