Wafer, semiconductor device, and fabrication methods therefor
AssigneeSharp Kabushiki Kaisha
InventorArinobu Kanegae
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Abstract
In order to fabricate a semiconductor device that can perform at its full capacity, in which (i) a single-crystal silicon integrated circuit is formed on an insulating substrate without an adhesive agent, and (ii) an active region of the single-crystal integrated circuit is not damaged by implantation of hydrogen ions, (a) the single-crystal silicon integrated circuit is formed on the insulating substrate, and (b) the single-crystal silicon integrated circuit is surrounded by an oxide (buried oxide layer made of silicon dioxide).
Claims6
1-4. (canceled)
A semiconductor device, comprising at least a single-crystal silicon integrated circuit on an insulating substrate, wherein the single-crystal silicon integrated circuit is completely surrounded by an oxide.
8-15. (canceled)
Dependencies are inferred from the claim text.