Process for manufacturing a microelectromechanical interaction system for a storage medium

A process for manufacturing a probe-storage device, comprising:

• forming a storage medium;
• forming an interaction system with a supporting element and an interaction element carried by said supporting element, the forming the interaction system including:
• providing a wafer of semiconductor material having a substrate with a first type of conductivity and a top surface;
• forming a first interaction region having a second type of conductivity, opposite to said first type of conductivity, in a surface portion of said substrate in proximity of said top surface;
• and
• carrying out an electrochemical etch of said substrate starting from said top surface, selective with respect to said second type of conductivity, so as to remove said surface portion of said substrate and separate said first interaction region from said substrate, thus forming said supporting element;
• and
• coupling said interaction system to the storage medium in such a way that said supporting element is suspended in cantilever fashion above said storage medium and said interaction element faces said storage medium.

A microelectromechanical interaction system, comprising:

• a monocrystalline semiconductor substrate;
• a monocrystalline semiconductor first supporting element extending in cantilever fashion from, and being integrated in, the substrate;
• a CMOS control circuit set within said substrate;
• and
• a first interaction element carried by said first supporting element.

A probe-storage device, comprising:

• a storage medium;
• and
• microelectromechanical interaction system that includes:
• a monocrystalline semiconductor substrate;
• a monocrystalline semiconductor first supporting element extending in cantilever fashion from, and being integrated in, the substrate;
• a CMOS control circuit set within said substrate;
• and
• a first interaction element carried by said first supporting element and structured to interact with the storage medium.