Back to results
US 2008/0164566 A1Published application
Method for forming a buried digit line with self aligning spacing layer and contact plugs during the formation of a semiconductor device, semiconductor devices, and systems including same
AssigneeMicron Technology, Inc.
InventorsJames E. Green, Terrence B. McDaniel
Life of this patent
Estimating the term…
Abstract
A method for use during fabrication of a semiconductor device comprises the formation of buried digit lines and contacts. During formation, a buried bit line layer may be used as a mask to etch one or more openings in a dielectric layer. A conductive layer is then formed in the one or more openings in the dielectric layer, and is then planarized to form one or more individual contact plugs. Next, the buried bit line layer is etched to recess the buried bit line layer, and a capacitor plate is formed to contact the contact plug.
Claims7
An electronic device, comprising:
- first and second conductive contacts separated by a non-contact dielectric material;
- a first dielectric material having a first portion overlying the first conductive contact and a second portion overlying the second contact, wherein the first and second portions of the first dielectric material have about equal widths;
- a second dielectric material having a first portion overlying the first portion of the first dielectric material and a second portion overlying the second portion of the first dielectric material, wherein the first and second portions of the second dielectric material have about equal widths which are less than the widths of the first and second portions of the first dielectric material and the first and second portions of the first dielectric material each forming at least one lip;
- and
- a conductive material interposed between the first and second portions of the first dielectric material and between the first and second portions of the second dielectric material, wherein the conductive material provides an etch mask for the at least each of the first and second portions of the first dielectric material.
2 more elements
An electronic device, comprising:
- a first conductive material adapted to function as a digit line;
- a second conductive layer adapted to function as a capacitor plug, wherein the first conductive material is electrically shorted to the second conductive material;
- and
- a dielectric spacing material defined by inside and outside sidewalls and having an opening therein, wherein the first conductive material overlies the dielectric spacing material and the second conductive material is at least partially located within the opening.
1 more element
Dependencies are inferred from the claim text.