Thin Film Capacitor and Manufacturing Method Therefor

A method of manufacturing a dielectric thin film capacitor, the method comprising:

• applying a first dielectric raw material solution containing an organic metal compound on a substrate and heating the solution to form an adhesive layer;
• alternately depositing, on the adhesive layer, a conductor layer and a dielectric thin film formed by applying a second dielectric raw material solution with a composition system the same as that of the first dielectric raw material solution and heating the second solution to form a capacitor portion;
• applying, on the capacitor portion, a third dielectric raw material solution with a composition system the same as that of the first or second dielectric raw material solution and heating the third solution to form a crystalline dielectric barrier layer;
• heat treating at a temperature of 750° C. or more in an oxygen atmosphere;
• forming a non-conductive amorphous inorganic barrier layer on the dielectric barrier layer;
• and
• forming a resin protective layer on the inorganic barrier layer.