Image sensor
OwnerYoung-Je Yuninventor
Life of this patent
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Abstract
Embodiments relate to an image sensor, and for directly manufacturing microlenses on color filter layers without forming a separate planarization layer, by forming the color filter layers having a relatively even step. According to embodiments, a method may include forming an interlayer dielectric layer on a semiconductor substrate formed with a plurality of photo diodes, forming color filter layers on the interlayer dielectric layer, forming a sacrifice layer on the whole surface including the color filter layers, making the steps of the color filter layers even by etching the upper surfaces of the color filter layers and the sacrifice layer, and forming microlenses on the color filter layers.
Claims20
A method, comprising:
- forming an interlayer dielectric layer over a semiconductor substrate having a plurality of photo diodes;
- forming color filter layers over the interlayer dielectric layer;
- forming a sacrifice layer over the semiconductor substrate, including the color filter layers;
- etching upper surfaces of the color filter layers and the sacrifice layer to make step differences of the color filter layers even;
- and
- forming microlenses over the color filter layers.
A device, comprising:
- a semiconductor substrate having a plurality of photo diodes;
- an interlayer dielectric layer over the semiconductor substrate;
- color filter layers over the interlayer dielectric layer;
- a sacrifice layer over the color filter layers;
- and
- a plurality microlenses over the color filter layers, wherein upper surfaces of the color filter layers and the sacrifice layer are etched to reduce step differences of the color filter.
A device, comprising:
- a plurality of color filter layers over a semiconductor substrate;
- a sacrifice layer over the color filter layers;
- and
- a plurality microlenses over the color filter layers, wherein upper surfaces of the color filter layers and the sacrifice layer are etched to reduce step differences of the color filter.
Dependencies are inferred from the claim text.