Semiconductor device with measurement pattern in scribe region

Abstract

A semiconductor device includes pads disposed in a chip region of a semiconductor substrate and line patterns disposed in a scribe region of the semiconductor substrate and extending toward the pads. The line patterns each have a line-width that is less than a predetermined distance between adjacent pads. Thus, respective interconnection lines connected to the pads are not short-circuited to each-other through the line patterns in the remaining scribe region after the chip region is sawed into a semiconductor chip.

Dependencies are inferred from the claim text.