Selective Gas Sensor
AssigneeInficon GmbH
InventorWerner Grosse Bley
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Abstract
A selective gas sensor is for determining the presence of a test gas, for example, helium includes an evacuated housing, sealed by a selectively gas-permeable membrane. The membrane is part of a sight glass, whereby the glass pane is provided with a hole, sealed by the membrane made from a silicon material. The frame of the membrane wall is connected to the housing by means of a high-vacuum soft-metal seal. The housing can also form one of the electrodes of the gas pressure sensor.
Claims16
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A selective gas sensor with an evacuated housing sealed by a selectively permeable membrane and comprising a gas pressure sensor with at least two electrodes, wherein
- the housing is metal and includes a membrane wall with a metal frame to which a glass pane is bonded, said glass pane having a hole sealed by the membrane.
Dependencies are inferred from the claim text.