Piezoelectric vibrating piece and piezoelectric vibrating device
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorTakehiro Takahashi
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Abstract
A piezoelectric vibrating piece having a first and a second surface at an opposing side of the first surface is comprised of an piezoelectric piece having designated coefficient of thermal expansion; a first electrode film having bigger coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the first surface; and a second electrode film having smaller coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the second surface.
Claims20
A piezoelectric vibrating piece having a first surface and a second surface at an opposing side of the first surface comprising:
- a piezoelectric piece having a designated coefficient of thermal expansion;
- a first electrode film having a bigger coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the first surface;
- and
- a second electrode film having a smaller coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the second surface.
A package comprising:
- a piezoelectric vibrating piece having a having a first surface and a second surface at an opposing side of the first surface, said piezoelectric vibrating piece having a designated coefficient of thermal expansion;
- a first electrode film having a bigger coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the first surface;
- a second electrode film having a smaller coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the second surface;
- and
- a cover sealing the piezoelectric vibrating piece within the package and capable of sustaining a vacuum state within the package.
Dependencies are inferred from the claim text.