Back to results
US 2008/0157629 A1Published application
Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsMotohisa Noguchi, Eiju Hirai
Life of this patent
Estimating the term…
Abstract
A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
Claims6
A piezoelectric element comprising:
- a seed layer formed on a base substrate;
- and
- a piezoelectric film formed on the seed layer;
- wherein the seed layer is formed of a perovskite type piezoelectric material oriented to pseudo cubic (100);
- and
- the piezoelectric film is formed of a relaxor material of a perovskite type oriented to pseudo cubic (100).
3 more elements
A piezoelectric element comprising:
- a seed layer formed on a base substrate;
- and
- a piezoelectric film formed on the seed layer;
- wherein the seed layer is formed of a perovskite type piezoelectric material oriented to pseudo cubic (100);
- and
- the piezoelectric film is formed of a relaxor material of a perovskite type having a rhombohedral structure, that is oriented to pseudo cubic (100).
3 more elements
Dependencies are inferred from the claim text.