Piezoelectric actuator, method for manufacturing piezoelectric actuator, and liquid transporting apparatus
AssigneeBrother Kogyo Kabushiki Kaisha
InventorHiroto Sugahara
Life of this patent
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Abstract
A piezoelectric actuator includes a supporting member in which pressure chambers are formed, a vibration plate which is joined to a joining section of the supporting member, a piezoelectric layer formed on the vibration plate, and an FPC provided on the piezoelectric layer. A contact section of an electrode formed on the piezoelectric layer and a terminal section of the FPC are electrically connected via a bump formed on the terminal section. A recess is formed on an upper surface of the supporting member right below the bump. While joining the piezoelectric layer and a wire member, any damage of the piezoelectric layer and any poor connection do not occur.
Claims8
-19. (canceled)
An electric connection structure comprising:
- a plate in which a reduced-stiffness section having a stiffness reduced than a stiffness of another portion of the plate is formed;
- a piezoelectric layer which has an electrode and which is arranged on a surface of the plate;
- a contact section which is formed on a surface of the piezoelectric layer on the side opposite to the plate, in an area overlapping the reduced-stiffness section of the plate, the contact section being connected to the electrode;
- and
- a wire member which supplies a drive voltage to the contact section, the wiring member having a terminal section, wherein:
- an electroconductive bump is formed on one of the terminal section of the wire member and the contact section, the bump being projected toward the other of the terminal section and the contact section to electrically connect the contact section and the terminal section, and the bump facing the reduced-stiffness portion of the plate.
Dependencies are inferred from the claim text.