Multiple stacked nanostructure arrays and methods for making the same

A method of fabricating a stacked nanostructure array, comprising:

• preparing a substrate;
• forming a bottom electrode directly on the substrate;
• growing a first nanostructure array directly on the bottom electrode;
• forming an insulating layer on the first nanostructure array;
• exposing the upper surface of the first nanostructure array;
• depositing a second nanostructure array on the first nanostructure array;
• forming an insulating layer on the second nanostructure array;
• exposing the upper surface of the second nanostructure array;
• forming a top electrode on the second nanostructure array.

A stacked nanostructure array, comprising:

• a substrate;
• a bottom electrode formed directly on the substrate;
• a first nanostructure array formed directly on the bottom electrode;
• an insulating layer formed on said first nanostructure array, and partially removed to expose the upper surface of said first nanostructure array;
• a second nanostructure array formed on said first nanostructure array and similarly insulated and exposed;
• forming a top electrode on said second nanostructure array.