Stacked MEMS Device
AssigneeAnalog Devices, Inc.
InventorsLiam O Suilleabhain, Raymond Goggin, Eva Murphy, Kieran Harney
Life of this patent
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Abstract
A MEMS apparatus has a MEMS device sandwiched between a base and a circuit chip. The movable member of the MEMS device is attached at the side up against the circuit chip. The movable member may be mounted on a substrate of the MEMS device or formed directly on a passivation layer on the circuit chip. The circuit chip provides control signals to the MEMS device through wire bonds, vias through the MEMS device or a conductive path such as solder balls external to the MEMS device.
Claims27
A MEMS apparatus comprising:
- a base having electrical interconnects;
- a MEMS device having a first side, a second side and a movable member attached at the second side, the first side being secured to the base;
- and
- a circuit chip for electrically controlling the movable member secured to the second side of the MEMS device, the MEMS device being between the base and the circuit chip.
A MEMS switch comprising:
- a MEMS device having a movable gold beam suspended from a semiconductor substrate and a semiconductor cap enclosing a chamber about the beam;
- a plurality of conductive vias through the semiconductor cap;
- a plurality of conductive bumps on the semiconductor cap, each in electrical connection with one of the vias;
- and
- a circuit chip for electrically controlling movement of the movable gold beam between an open position breaking an electrical connection with the vias and a closed position completing an electrical connection with the vias, the circuit chip being secured parallel to and on the semiconductor substrate.
A MEMS apparatus comprising:
- a circuit chip having circuitry and a passivated surface;
- MEMS microstructure formed on the passivated surface of the circuit chip;
- and
- a cap over the MEMS microstructure, the cap having a first conductive path for providing electrical communication with the MEMS microstructure.
The MEMS apparatus of 25 wherein the first conductive path comprises a conductive material with a resistivity less than 0.01 ohm per square.
Dependencies are inferred from the claim text.