Single-Chip Monolithic Dual-Band Visible- or Solar-Blind Photodetector
AssigneeIntegrated Micro Sensors Inc.
InventorsDavid Starikov, Abdelhak Bensaoula
Life of this patent
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Abstract
A photodetector having sensitivity in a wide temperature range in both an infrared and an ultraviolet band is provided. The photodetector is formed on a single chip and is designed to be blind to solar or visible radiation. Structures disclosed allow fast and efficient detection of signals with high spatial and temporal resolution. Such sensors may be used for multi-pixel focal arrays and applied for fire detection applications, various space- and military-related applications and other applications. A method for increasing rejection of visible light by the IR sensitive material is also provided.
Claims7
A monolithic single chip solid-state visible- or solar-blind photodetector for sensing of optical radiation separately in UV and IR bands, comprising:
- a silicon substrate having a thickness greater than about 10 micrometers such as to effectively block visible or solar radiation and having a front side exposed to the optical radiation and a back side;
- an active semiconductor layer on the front side of the single substrate having a sensitivity in the ultraviolet (UV) range only and a first pair of contacts to produce a first signal;
- and
- an active semiconductor layer on the back side of the single substrate having a sensitivity in the infrared (IR) range and a second pair of contacts vertically aligned with the first pair of contacts to produce a second signal.
A method for increasing rejection of visible light by an IR sensitive layer on a back side of a monolithic single chip solid-state visible- or solar-blind photodetector for sensing of optical radiation separately in UV and IR bands, the photodetector comprising a substrate, a front side exposed to the optical radiation and the back side, an active semiconductor layer on the front side of the substrate having a sensitivity in the ultraviolet (UV) range only and a first pair of contacts to produce a first signal, and a second pair of contacts on the IR sensitive layer on the back side, the second pair of contacts being vertically aligned with the first pair of contacts to produce a second signal, comprising:
- applying a reverse bias to the contacts on the IR sensitive layer.
Dependencies are inferred from the claim text.