Semiconductor device and method of fabricating the same, and nand gate circuit using the semiconductor device
OwnerJung-Ho Ahninventor
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OwnerJung-Ho Ahninventor
Estimating the term…
A method of forming a semiconductor device that can include forming a channel region in a semiconductor substrate; forming a first gate electrode and a second gate electrodes over the semiconductor substrate, the first gate electrode and the second gate electrode being spaced apart from each other at a predetermined distance; forming spacers on sidewalls of the first gate electrode and the second gate electrode and over the semiconductor substrate; forming source/drain regions in the semiconductor substrate; forming a first interlayer insulating layer and a second interlayer insulating over the semiconductor substrate; forming a plurality of contact holes in the first interlayer insulating layer and the second interlayer insulating; and then forming a contact plug in the plurality of contact holes.
An apparatus comprising:
A method comprising:
A method comprising:
Dependencies are inferred from the claim text.