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US 2008/0157161 A1Published application
Apparatus, system, and method for multiple-segment floating gate
AssigneeIntel Corporation
InventorsQiang Tang, Venkat Narayanan
Life of this patent
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Abstract
Various embodiments include a substrate and a memory cell coupled to the substrate. The memory cell may include an L-shaped floating gate. Other embodiments including additional apparatus, systems, and methods are disclosed.
Claims30
An apparatus comprising:
- a substrate;
- and
- a first memory cell coupled to the substrate, the first memory cell including a first L-shaped floating gate.
A system comprising:
- a flash memory device including,
- a substrate;
- and
- a first memory cell coupled to the substrate, the first memory cell including a first L-shaped floating gate;
- and
- a circuit board coupled to the flash memory device, the circuit board including a terminal to couple to a battery to provide power to the flash memory device.
3 more elements
A method comprising:
- forming on a substrate a plurality of ridges and a plurality of gaps interleaved with the ridges, each of the ridges having a length in a Y-axis dimension;
- forming a first conductive layer overlying the plurality of ridges and the plurality of gaps;
- removing a portion of the first conductive layer overlying the plurality of ridges to divide the first conductive layer into a plurality of conductive strips in the plurality of gaps, each of the conductive strips having a U-shape and a length in the Y-axis dimension;
- removing a portion of at least one of a first segment and a second segment of each of the conductive strips to obtain a plurality of remaining conductive strips;
- forming an insulation layer overlying the plurality of remaining conductive strips;
- forming a second conductive layer overlying the insulation layer;
- and
- removing a portion of the second conductive layer, a portion of the insulation layer, and a portion of each of the remaining conductive strips to form a plurality of structures, each of the structures having a length in an X-axis dimension substantially perpendicular to the Y-axis dimension, and wherein each of the structures includes a row of gates and a word line overlying the row of floating gates.
5 more elements
Dependencies are inferred from the claim text.