Method of Fabricating Grabbing Face of Sample Grabbing Portion
AssigneeSII NanoTechnology Inc.
InventorMasanao Munekane
Life of this patent
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Abstract
By working a grabbing portion by a charged particle beam of FIB or the like, the grabbing portion in parallel with the beam can be formed, and also dust adhered to the grabbing portion is removed. When a small sample represented by a TEM sample is fabricated by being cut out by etching by a charged particle beam and is carried at inside of an apparatus of irradiating a charged particle beam, the sample is etched in a direction of irradiating the charged particle beam, and therefore, a mechanism pinched by a grabbing face of a grabbing portion can be worked in a direction the same as that in working the sample, and therefore, a change in an attitude can be reduced when the sample and the grabbing face are fabricated by parallel faces.
Claims11
A method for carrying a sample comprising the steps of:
- etching a grabbing portion of a sample carrying mechanism using a charged particle beam such that the grabbing faces become substantially in parallel with a grabbed face of the sample;
- and
- carrying the sample by grabbing the sample with the grabbing portion.
A method of fabricating a grabbing face of a sample grabbing portion characterized in that a grabbing face of a sample grabbing portion of a sample carrying mechanism is worked by etching by using a charged particle beam such that the grabbing face becomes substantially in parallel with a grabbed face of the sample.
Dependencies are inferred from the claim text.