Advanced mixing system for integrated tool having site-isolated reactors
AssigneeIntermolecular, Inc.
InventorsKurt H. Weiner, Tony P. Chiang, Aaron Francis, John Schmidt
Life of this patent
Estimating the term…
Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Claims82
An integrated processing tool comprising a site-isolated reactor (SIR), wherein the SIR includes:
- a set of first manifolds, wherein each first manifold is coupled to a plurality of chemicals;
- a plurality of mixing vessels, wherein each mixing vessel is coupled to an output of each first manifold;
- a set of second manifolds, wherein each second manifold is coupled to an output of at least one mixing vessel and a plurality of chemicals;
- and
- a plurality of flow cells, wherein each flow cell is coupled to an output of at least one second manifold.
An integrated processing system, comprising
- a full-wafer processing module;
- and
- a combinatorial processing module, wherein chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds, an output of each first manifold coupled to at least one mixing vessel, an output of each mixing vessel feeding more than one of a set of second manifolds, an output of each set of second manifolds feeding one of a plurality of site-isolated reactors of the combinatorial processing module.
A substrate processing system comprising:
- a fluid delivery system;
- a plurality of site-isolated reactors coupled to the fluid delivery system, the plurality of site-isolated reactors configured to receive chemicals from the fluid delivery system, the plurality of site-isolated reactors configured for independent control of chemical delivery and processing parameters used to effect site-isolated processing of a wafer;
- and
- a full wafer reactor coupled to the fluid delivery system, the full wafer reactor effecting full-wafer processing of the wafer, the full-wafer processing integrated with the site-isolated processing.
A method of mixed-mode processing of a substrate, comprising:
- generating a plurality of solutions from a plurality of chemicals, wherein a composition is varied in a combinatorial fashion and independently controlled between different ones of the plurality of solutions;
- and
- dispensing the chemicals and the solutions through a fluid delivery system to a conventional processing module and a combinatorial module, wherein the delivery system feeding the combinatorial processing modules is shared with the delivery system feeding the conventional processing module, such that the solution delivered to one site isolated reactor in the combinatorial processing module can be varied independently from the solution delivered to a second site isolated reactor in the combinatorial processing module.
Dependencies are inferred from the claim text.