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US 2008/0156679 A1Published application
Environmental isolation system for flat panel displays
OwnerAnthony C. Bonora, Michel Pharand +1inventors
InventorsAnthony C. Bonora, Michel Pharand, Richard Gould
Life of this patent
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Abstract
The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.
Claims30
A container for a flat panel display, comprising:
- a base;
- a top;
- sidewalls extending between the base and the top, wherein an opening is defined along a side of the container,
- a flexible door moveably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, wherein ends of the rigid top member and ends of the rigid bottom member are affixed to corresponding drive members, the corresponding drive members synchronized with each other through a rotatable shaft.
1 more element
A container for transporting flat panel displays, comprising:
- a plurality of spaced apart support members defined within the container for supporting the flat panel displays;
- an opening defined along a surface of the container, the opening providing access to an inner region of the container;
- a flexible door moveably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a drive member;
- a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the drive member to move the flexible door to open and close access to the inner region of the container;
- and
- an air supply affixed to a surface of the container, the air supply having access to the inner region of the container, the air supply configured to generate air pressure within the container to prevent ingress of particulates from an external environment.
3 more elements
A flat panel display processing system, comprising:
- a flat panel display processing tool;
- an enclosure having a controlled environment therein, the enclosure housing a handling robot for moving the flat panel substrate to and from the flat panel display processing tool and a load port configured to move a flat panel substrate therethrough;
- a container configured to transport the flat panel substrate, the container configured to interface with the load port through a moveable door moveably disposed over an opening defined along a surface of the container, the moveable door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a plurality of drive members, the container further including a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the plurality of drive members to move the flexible door to open and close access to the inner region of the container, wherein the moveable door slideably moves around an outer surface of the container.
A flat panel display processing system, comprising:
- a flat panel display processing tool;
- a container configured to transport a substrate, the container configured to interface with the processing tool through a moveable door moveably disposed over an opening defined along a surface of the container, the moveable door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a plurality of drive members, the container further including a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the plurality of drive members to move the flexible door to open and close access to the inner region of the container, wherein the moveable door slideably moves around an outer surface of the container.
Dependencies are inferred from the claim text.