Methods of Producing Plasma in a Container

A method for producing plasma in a container and applying produced plasma to conduct ashing of a work piece, the method comprising the steps of:

• flowing gas into a container comprising walls of a dielectric material, the gas comprising a gaseous component able to form plasma when subjected to appropriate excitation energy;
• directing a proportion of the gas to a first region of the container to form a higher gas density in the first region of the container, the first region of the container comprising a region closest to an external source of excitation energy into the container;
• applying sufficient excitation energy by means of the external source of excitation energy to gas in at least the first region to excite a proportion of the gaseous component able to form plasma to a plasma state;
• and
• directing the formed plasma onto a surface of a work piece.

A method for producing plasma in a container and applying produced plasma to conduct ashing of a work piece, the method comprising the steps of:

• flowing gas into a container comprising walls of quartz, the gas comprising a gaseous component able to form plasma when subjected to appropriate excitation energy;
• directing a major proportion of the gas to a first region of the container to form a higher gas density in the first region of the container, the first region of the container comprising a region closest to an external source of excitation energy comprising a symmetrical coil into the container;
• applying sufficient excitation energy by means of the symmetrical coil to gas in at least the first region of the container to excite a proportion of the gaseous component able to form plasma to a plasma state;
• and
• directing the formed plasma onto a surface of a work piece.