Methods of forming piezoelectric resonant device having piezoelectric resonator

A method of forming a piezoelectric resonant device, comprising:

• preparing two or more even number of green bodies, each green body being formed into a cube surrounded by six planes;
• sintering the green bodies;
• forming green substrates by grinding the green bodies;
• forming substrate polarizing layers on facing surfaces between the green substrates and opposite surfaces to the facing surfaces;
• polarizing the green substrates using the substrate polarizing layers;
• selecting two green substrates from the green substrates, and forming internal and external substrate electrode patterns on the two green substrates, the internal and external substrate electrode patterns being formed on the facing surfaces between the two green substrates and the opposite surfaces to the facing surfaces using the substrate polarizing layer, respectively;
• forming an adhesive agent on the facing surfaces between the two green substrates;
• forming at least one piezoelectric resonant pattern by cutting the two green substrates, the piezoelectric resonant pattern having a connecting adhesive pattern, an insulating adhesive pattern, resonant patterns, external resonant electrode patterns, and internal resonant electrode patterns, the external and internal resonant electrode patterns and the resonant patterns respectively corresponding to the internal and external substrate electrode patterns and the green substrates, and the connecting and insulating adhesive patterns corresponding to the adhesive agent;
• forming a piezoelectric resonator having connection electrodes between the internal resonant electrode patterns and between the external resonant electrode patterns to be disposed on the piezoelectric resonant pattern;
• and
• repeatedly selecting two in a unit from the rest of the green substrates, and sequentially forming the internal and external substrate electrode patterns, forming the adhesive agent, forming the piezoelectric resonant pattern, and forming the piezoelectric resonator.

A method of forming a piezoelectric resonant device, comprising:

• preparing two or more even number of green bodies, each green body being formed into a cube surrounded by six planes;
• sintering the green bodies;
• forming green substrates by grinding the green bodies, respectively;
• forming substrate polarizing layers on facing surfaces between the green substrates and opposite surfaces to the facing surfaces;
• polarizing the green substrates using the substrate polarizing layers;
• selecting two green substrates from the green substrates, and forming internal and external substrate electrode patterns thereon, the internal and external substrate electrode patterns being formed on the facing surfaces between the two green substrates and the opposite surfaces to the facing surfaces using the substrate polarizing layers;
• forming an adhesive agent on the facing surfaces between the two green substrates;
• repeatedly selecting two in a unit from the rest of the green substrates, sequentially forming the internal and external substrate electrode patterns thereon, and forming the adhesive agent;
• forming piezoelectric resonant patterns by cutting the green substrates, each of the piezoelectric resonant patterns having a connecting adhesive pattern, an insulating adhesive pattern, resonant patterns, external resonant electrode patterns, and internal resonant electrode patterns, the external and internal resonant electrode patterns and the resonant patterns corresponding to the internal and external substrate electrode patterns and the green substrates, respectively, and the connecting and insulating adhesive patterns corresponding to the adhesive agent;
• and
• repeatedly selecting one in a unit from the piezoelectric resonant patterns, and forming a plurality of piezoelectric resonators having connection electrodes between the internal resonant electrode patterns and between the external resonant electrode patterns to be disposed on the piezoelectric resonant pattern.

A method of forming a piezoelectric resonant device, comprising:

• preparing two green bodies, each green body being formed into a cube surrounded by six planes;
• sintering the green bodies;
• forming green substrates by grinding the green bodies, respectively;
• forming internal and external substrate electrode patterns on facing surfaces between the green substrates and on opposite surfaces to the facing surfaces, respectively;
• polarizing the green substrates using the internal and external substrate electrode patterns;
• forming an adhesive agent on the facing surfaces between the green substrates;
• forming at least one piezoelectric resonant pattern by cutting the green substrates, the at least one piezoelectric resonant pattern having a connecting adhesive pattern, an insulating adhesive pattern, resonant patterns, external resonant electrode patterns and internal resonant electrode patterns, the external and internal resonant electrode patterns and the resonant patterns respectively corresponding to the internal and external substrate electrode patterns and the green substrates, and the connecting and insulating adhesive patterns corresponding to the adhesive agent;
• and
• forming a piezoelectric resonator having connection electrodes between the internal resonant electrode patterns and between the external resonant electrode patterns to be disposed on the piezoelectric resonant pattern.