Ceramic multilayer substrate and method for manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorMasato Nomiya
Life of this patent
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Abstract
A ceramic multilayer substrate exhibiting reduced pealing and breakage of an internal conductor disposed between a ceramic layer serving as a base member and a ceramic layer for restricting shrinkage includes a first ceramic layer 11, a second ceramic layer 12 laminated so as to come into contact with a principal surface of the first ceramic layer 11, and an internal conductor 13 disposed between the first ceramic layer 11 and the second ceramic layer 12, a phosphorus component layer 16a is disposed in the first ceramic layer 11 with a concentration gradient in which the concentration decreases in a direction away from the internal conductor 13.
Claims19
A ceramic multilayer substrate characterized by comprising a sintered laminate containing:
- a first ceramic layer of a first ceramic material and having a principal surface;
- a second ceramic layer laminated so as to be in contact with the principal surface of the first ceramic layer and which contains a second ceramic material which has a sintering temperature higher than the sintering temperature of the first ceramic material;
- and
- an internal conductor disposed between the first ceramic layer and the second ceramic layer,
- wherein a part of the first ceramic material has permeated from the first ceramic layer into the second ceramic layer, and
- the first ceramic layer contains a phosphorus component with a concentration gradient in which the concentration decreases in a direction away from the internal conductor.
A method for manufacturing a ceramic multilayer substrate, characterized by comprising:
- (a) providing a ceramic green laminate comprising
- a first ceramic green layer containing a first ceramic material and having a principal surface,
- a second ceramic green layer laminated so as to be in contact with the principal surface of the first ceramic green layer and which contains a second ceramic material having a sintering temperature higher than the sintering temperature of the first ceramic material, and
- an electrically conductive paste film disposed between the first ceramic green layer and the second ceramic green layer and which contains phosphorus or a phosphorus compound;
- and
- (b) firing the ceramic green laminate at a temperature at which the first ceramic material is sintered and the second ceramic material is not sintered, and at which
- a part of the first ceramic material permeates from the first ceramic green layer into the second ceramic green layer, and the phosphorus component diffuses from the electrically conductive paste film into the first ceramic green layer and the second ceramic green layer.
Dependencies are inferred from the claim text.