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AssigneeApplied Materials, Inc.
InventorsDonald J.K. Olgado, Sheshraj L. Tulshibagwale, Thomas B. Brezoczky, John S. Lewis, Ho Seon Shin, Hui Chen, Roy C. Nangoy
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Embodiments of the present invention relate to semiconductor device manufacturing, and more particularly to a horizontal megasonic module for cleaning substrates. In one embodiment an apparatus for cleaning a substrate is provided. The apparatus comprises a tank adapted to contain a cleaning fluid, a movable housing having a first side adapted to be placed in the cleaning fluid, a plurality of rotatable rollers coupled to the first side of the housing, the rollers positioned and including grooves to securely hold the substrate in a horizontal orientation, and one or more transducers adapted to direct vibrational energy through the cleaning fluid in the tank toward the substrate, wherein at least one of the transducers directs vibrational energy toward the substrate and substantially parallel to a major surface of the substrate.
An apparatus for cleaning a substrate comprising:
An apparatus for cleaning multiple substrates, comprising:
Dependencies are inferred from the claim text.