Substrate processing apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorIchiro Mitsuyoshi
Life of this patent
Estimating the term…
Abstract
A reversing unit includes a fixed plate, a first movable plate provided so as to face one surface of the fixed plate, a second movable plate provided so as to face the other surface of the fixed plate and a rotary actuator. The rotary actuator rotates the first movable plate, the second movable plate and the fixed plate around a horizontal axis. A distance between the first movable plate and the fixed plate and a distance between the second movable plate and the fixed plate are set to be substantially equal to a difference in height between two hands of a main robot that carry a substrate in and out.
Claims14
A reversing device comprising:
- a first holding mechanism that holds a substrate in a state vertical to a first axis;
- a second holding mechanism that holds the substrate in the state vertical to said first axis;
- a supporting member that supports said first and second holding mechanisms so that said first and second holding mechanisms overlap with each other in a direction of said first axis;
- and
- a rotating device that integrally rotates said supporting member together with said first and second holding mechanisms around a second axis substantially vertical to said first axis.
A substrate processing apparatus that performs processing on a substrate having a top surface and a back surface, comprising:
- a reversing device that reverses said top surface and said back surface of the substrate;
- and
- a transport device that has first and second transport holders and carries the substrate into and out of said reversing device, wherein
- said reversing device includes
- a first holding mechanism that holds the substrate in a state vertical to a first axis,
- a second holding mechanism that holds the substrate in the state vertical to said first axis,
- a supporting member that supports said first and second holding mechanisms so that said first and second holding mechanisms overlap with each other in a direction of said first axis, and
- a rotating device that integrally rotates said support member together with said first and second holding mechanisms around a second axis that is substantially vertical to said first axis.
Dependencies are inferred from the claim text.