Substrate processing apparatus and substrate processing method

A substrate processing method that subjects a substrate to processing by a substrate processing apparatus including a carrying in and out region that includes a container platform and a first transport device, a processing region that includes a plurality of processing units and a second transport device and first and second reversing devices provided between said processing region and said carrying in and out region, comprising the steps of:

• taking the substrate before the processing out of a storing container placed on said container platform and transferring the taken out substrate before the processing to said first reversing device by said first transport device;
• reversing the substrate before the processing in said first reversing device;
• receiving the substrate before the processing from said first reversing device and carrying the received substrate into any of said plurality of processing units by said second transport device;
• carrying the substrate having been processed in any of said plurality of processing units out of the processing unit and transferring the carried out substrate after the processing to said second reversing device by said second transport device;
• and
• receiving the substrate after the processing from said second reversing device and storing the received substrate after the processing in said storing container by said first transport device.