Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method

A vacuum deposition device comprising:

• an evaporation source and a deposited body arranged within a vacuum chamber, a space between the evaporation source and the deposited body surrounded by a tubular body heated at a temperature by which a substance of the evaporation source is vaporized, and the substance vaporized from the evaporation source is made to reach a surface of the deposited body through an inner side of the tubular body so as to be deposited, and a control member for controlling so as to guide movement of said vaporized substance toward the deposited body within said tubular body, said control member disposed within said tubular body and spaced inwardly away from an open end portion of said tubular body proximate the surface of the deposited body, said control member comprising a member having a plurality of through holes therein, said control member having a surface facing toward said open end portion of said tubular body, said control member surface being substantially parallel to the surface of the deposited body on which the substance is deposited, a pair of obstacle plates extending inwardly toward each other from two opposite sides of said tubular body and positioned proximate the open end portion of the tubular body, said obstacle plates forming a gap between them that becomes narrower toward a center area of the tubular body and wider toward sides of said tubular body located between said opposite sides, said control member including a porous plate disposed in said tubular body at a position proximate the evaporation source.