Plasma Generator Apparatus

An apparatus for ashing a work piece, the apparatus comprising:

• (a) a container configured for flow there through from an inlet end to an outlet end, the container comprising side walls adapted for ionization of a portion of at least one component of the gas flowing through the container;
• (b) a gas flow distributor adapted to direct gas flow to a region within the container;
• (c) a segmented coil surrounding at least a portion of side walls the container, the portion adjacent the region of the container to which the gas flow distributor directs gas flow, the segmented coil free of any Faraday shield interposed between the segmented coil and the portion of the side walls;
• (d) a radio frequency generator coupled to the segmented coil;
• and
• (e) a diffusion plate at an exit end of the container to direct gas flow onto a surface of a work piece to be ashed.

A plasma generator apparatus for ashing a work piece, the apparatus comprising:

• (a) a container of larger diameter configured for continuous gas flow there through from an inlet end to an outlet end, the container comprising side walls of a dielectric material adapted for containing charged particles produced by radio frequency discharge into a gas, the container having a domed-shaped or cone-shaped upper portion;
• (b) a gas flow distributor proximate the dome-shaped or cone-shaped upper portion of the container, the gas flow distributor adapted to direct gas flow to a region within the container;
• (c) a diffusion plate proximate an outlet end of the container to direct gas flow from inside the container onto a surface of a work piece to be treated;
• (d) a symmetrical coil comprising at least 2 segments, the symmetrical coil surrounding at least a portion of the side walls of the container, the portion of the side walls adjacent the region within the container to which the gas flow distributor directs gas flow;
• and
• (e) a radio frequency generator coupled to the symmetrical coil.