Apparatus And Process For Crystal Growth
OwnerArnab Basu, Max Robinson +2inventors
InventorsArnab Basu, Max Robinson, Ben Cantwell, Andy Brinkman
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Abstract
The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.
Claims29
Apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising:
- at least one central source chamber;
- a plurality of growth chambers;
- a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers wherein the at least one source chamber is thermally decoupled from the growth chambers.
A process for bulk vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising:
- providing one reservoir of source material and a plurality of growth chambers each associated with independent temperature means;
- and transporting vapour phase material between the source and growth chambers.
Dependencies are inferred from the claim text.