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US 2008/0156112 A1Published application
Force sensor chip
AssigneeHonda Motor Co., Ltd.
InventorsNobuhiro Sakurai, Takeshi Ohsato
Life of this patent
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Abstract
A force sensor chip including a semiconductor substrate having a plurality of strain resistance elements and temperature-compensating resistance elements corresponding to the resistance elements is disclosed. The structure in the periphery of parts where the strain resistance elements, which are provided to deforming parts in the action part formed on the semiconductor substrate, are disposed is the same as the structure in the periphery of parts where the temperature-compensating resistance elements in the action part are disposed.
Claims9
A force sensor chip comprising:
- a base member having an action part that has an external force action region and non-deforming regions, a support part for supporting the action part, and connecting parts for connecting the action part and the support part;
- strain resistance elements provided to the connecting parts;
- and
- temperature-compensating resistance elements provided to the non-deforming regions of the action part,
- wherein a peripheral part of the connecting parts where the strain resistance elements are disposed has a same structure as that of a peripheral part of the non-deforming regions where the temperature-compensating resistance elements are disposed.
2 more elements
A force sensor chip comprising:
- a base member having:
- an action part that has an external force action region and non-deforming regions;
- a support part for supporting the action region;
- and connecting parts for connecting the action part and the support part;
- and
- strain resistance elements provided to the connecting parts,
- wherein the base member comprises a semiconductor substrate having crystal orientation, and initial resistance values of the strain resistance elements formed on the base member are set to different values in consideration of the crystal orientation in accordance with each of two perpendicular axes on a surface of the base member.
4 more elements
Dependencies are inferred from the claim text.