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US 2008/0156098 A1Published application
Monolithic antenna excited acoustic transduction device
AssigneeUniversity of Maine System Board of Trustees
InventorsJohn F. Vetelino, Donald F. McCann
Life of this patent
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Abstract
A Monolithic Antenna Excited Acoustic Transduction (MAEAT) device is fabricated by photolithographically depositing a metallic antenna on one side of a piezoelectric crystal substrate.
Claims25
An acoustic wave device comprising:
- a substrate formed from a piezoelectric material;
- and
- a single electrode formed upon a surface of said substrate, said electrode operative to propagate acoustic waves.
A testing apparatus comprising:
- an acoustic wave device having a single electrode formed upon a surface of a substrate formed from a piezoelectric material said electrode operative to propagate acoustic waves;
- a variable frequency oscillator connected to said exciting antenna;
- a sensing circuit connected to said oscillator;
- and
- a controller connected to said oscillator and said sensing circuit, said controller operative to sweep said oscillator through a range of frequencies that include a characteristic frequency of said acoustic device while monitoring a parameter of said acoustic device.
2 more elements
A method for fabricating an acoustic wave device comprising the steps of:
- (a) providing a piezoelectric crystal:
- (b) cutting the crystal to form a substrate having a reference surface for generation of surface acoustic waves and a sensing surface for immersion into an environment that contains a measurand of interest, the sensing surface being parallel to the reference surface;
- and
- (c) depositing a single electrode upon the reference surface of the substrate.
1 more element
Dependencies are inferred from the claim text.