Container transport system and measurement container
AssigneeAsyst Technologies Japan, Inc.
InventorsMasanao Murata, Susumu Maetaki
Life of this patent
Estimating the term…
Abstract
A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.
Claims5
A container transport system comprising:
- a storage container which includes a housing forming a space for storing a substrate and an opening, formed in the housing, for making a gas flow into the space;
- plural purge units each of which includes a purge table on which the storage container is placed and a gas inlet for making a gas flow for purge into the space from the opening by communicating with the opening in such a case that the storage container is placed on the purge table;
- a measurement container which includes a gas passage communicating with the gas inlet in a case of being placed on the purge table and a flow amount measurement unit which measures a flow amount of gas flowing in from the gas inlet through the gas passage;
- and
- a transport unit which transports the storage container to the purge table and which transports the measurement container between the plural purge tables.
A measurement container in a transport system of a container including:
- a storage container which stores a substrate;
- plural purge units each of which includes a purge table on which the storage container is placed and a gas inlet for making a gas flow into a space formed by the storage container;
- and a transport unit which transports the storage container and the measurement container, comprising:
- a gas passage which communicates with the gas inlet in a case of being placed on the purge table;
- and
- a flow amount measurement unit which measures a flow amount of gas flowing in from the gas inlet through the gas passage.
Dependencies are inferred from the claim text.