Methods for Forming Thermotunnel Generators Having Closely-Spaced Electrodes
AssigneeThe Boeing Company
InventorMinas H. Tanielian
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Abstract
The present disclosure relates to methods of forming solid state thermal engines that provides a closely-spaced thermal tunneling gap between a hot and cold electrode. The effective gap may be on the order of one nanometer. In one embodiment, a via is etched through a first side of first and second substrates, and metal electrodes are attached to a second side of the first and second substrates. The second sides are opposite the first sides. The metal electrodes are mated by bonding the second side of the first substrate to the second side second substrate. The gap may be formed by applying a voltage greater than a threshold voltage across the mated electrodes.
Claims23
A method of making a solid state thermal engine device for converting thermal energy into an electric current, the method comprising:
- forming a via through first sides of first and second substrates;
- attaching metal electrodes to second sides of the first and second substrates, wherein the second sides are opposite the first sides;
- mating the metal electrodes by bonding the second side of the first substrate to the second side of the second substrate to form a solid state thermal engine device;
- and
- applying at least one of a voltage or a current across the mated electrodes to form an effective gap between the two electrodes.
A method for cooling and converting thermal energy into an electric current, the method comprising:
- etching a via through first sides of first and second substrates;
- attaching metal electrodes to second sides of the first and second substrates, wherein the second sides are opposite the first sides;
- mating the metal electrodes by bonding the second side of the first substrate to the second side of the second substrate;
- applying at least one of a voltage or a current across the mated electrodes to form an effective gap between the two electrodes to form a solid state thermal engine device;
- and
- connecting one of the metal electrodes to a first surface and the other metal electrode to a second surface.
A method of making a solid state thermal engine device for converting thermal energy into an electric current, the method comprising:
- forming a via through first sides of first and second substrates;
- attaching conductive electrodes to second sides of the first and second substrates, wherein the second sides are opposite the first sides;
- aligning the conductive electrodes of the first and second substrates;
- and
- applying at least one of a voltage or a current across the mated electrodes wherein a formed between the conductive electrodes.
Dependencies are inferred from the claim text.