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US 2008/0155826 A1Published application
Method of manufacturing mems ics
AssigneeSilverbrook Research Pty Ltd
InventorsMark Jackson Pulver, Kia Silverbrook
Life of this patent
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Abstract
Methods of manufacturing an integrated circuit incorporating MEMS are provided. The methods include laying out the integrated circuit using a plurality of overlapping reticles.
Claims9
A method of manufacturing an integrated circuit incorporating MEMS, comprising laying out the integrated circuit using a plurality of overlapping reticles.
A method laying out an integrated circuit incorporating MEMS, the method including the steps of:
- defining a layout of an integrated circuit;
- defining a joint path;
- and
- modifying at least one element within an overlap area adjacent the joint path to take into account reticle field overlap during a subsequent manufacturing step.
1 more element
Dependencies are inferred from the claim text.