Back to results
US 2008/0131239 A1Published application
Integrated gripper for workpiece transfer
AssigneeDynamic Micro Systems
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.
Claims20
An integrated reticle handler comprising
- an edge gripper for gripping a reticle from the edges of two sides
- a fork gripper for gripping a reticle from one side;
- and
- a controller for selecting a gripper corresponding to the reticle.
1 more element
An integrated wafer handler comprising
- an edge gripper for gripping a wafer from the edges;
- an end effector for holding a wafer from the bottom;
- and
- a controller for selecting a gripper corresponding to the wafer.
1 more element
An integrated workpiece handler comprising
- a vertical gripper for gripping a workpiece from a vertical position;
- a horizontal gripper for gripping a workpiece from a horizontal position;
- and
- a controller for selecting a gripper corresponding to the wafer.
1 more element
Dependencies are inferred from the claim text.