System and method to divide fluid flow in a predetermined ratio

A system for dividing flow of a process fluid in a predetermined flow ratio, the system comprising:

• a fluid source for providing one or more process fluids;
• a mass flow controller coupled to the fluid source;
• a plurality of modulating valves coupled to the mass flow controller;
• a process chamber having a plurality of inlets for delivering the process fluid into the process chamber, wherein each inlet of the plurality of inlets is coupled to a modulating valve;
• and
• a controller coupled to the plurality of modulating valves, the controller configured to control the operation of the plurality of modulating valves to divide the flow of the process fluid in the predetermined flow ratio.

A method for dividing flow of a process fluid in a predetermined flow ratio, the method comprising the steps of:

• flowing the process fluid from a fluid source to a process chamber having a plurality of inlets through a plurality of valves;
• metering the process fluid by a mass flow controller;
• and
• modulating the plurality of valves to divide the flow of the process fluid into a predetermined flow ratio between each of the plurality of inlets, wherein the plurality of valves are modulated by a controller.