Nanolithography methods and products therefor and produced thereby
AssigneeNorthwestern University
InventorsChad Mirkin, Seunghun Hong, Vinayak P. Dravid
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Abstract
In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
Claims25
A method of nanolithography, comprising:
- providing a substrate;
- providing a tip comprising an internal cavity having an external opening to the surface of said tip, wherein said opening comprises an internal diameter of less than about 200 nanometers
- loading said cavity with a deposition compound, wherein said deposition compound does not pass through said external opening in the absence of a driving force;
- and
- subjecting said tip to a driving force to deliver said deposition compound through said external opening to be deposited on said substrate.
-5. (canceled)
-19. (canceled)
-28. (canceled)
A method of nanolithography, comprising:
- providing a substrate;
- providing a scanning probe microscope tip comprising an internal cavity having an external opening to the surface of said tip, wherein said tip is coated with a hydrophobic compound and wherein said opening comprises an internal diameter of about 1 nanometers to about 15 nanometers;
- loading said cavity with a deposition compound, wherein said deposition compound does not pass through said external opening in the absence of a driving force;
- and
- subjecting said tip to a driving force to deliver said deposition compound through said external opening to be deposited on said substrate, wherein said driving force is selected from the group consisting of an electrical, a magnetic and a chemical driving force.
-49. (canceled)
A method of nanolithography, comprising:
- providing a substrate;
- providing a scanning probe microscope tip;
- coating the tip with a deposition compound;
- and
- subjecting said coated tip to a driving force to deliver said deposition compound to said substrate so as to produce a desired pattern.
-74. (canceled)
Dependencies are inferred from the claim text.