Removable compartments for workpiece stocker
AssigneeDynamic Micro Systems
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.
Claims17
A method for improving the operation of a workpiece stocker, the stocker comprising
- a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of compartments;
- a robotic mechanism to transfer the workpieces from the chamber to an IO station;
- and
- a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure,
- the method comprising
- assessing that the robotic mechanism fails;
- and
- emergency accessing a compartment without contaminating other compartments.
A method for improving the operation of a workpiece stocker, the stocker comprising
- a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of sealed compartments;
- a robotic mechanism to transfer the workpieces from the chamber to an IO station;
- and
- a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure,
- the method comprising
- determining the current compartment having the workpiece to be accessed;
- unsealing the current compartment;
- transferring the workpiece within the current compartment;
- and
- re-sealing the current compartment,
- wherein the workpieces are prevented from contamination by being sealed within the compartments when the chamber is exposed to the outside ambient during an emergency access.
A method for improving the operation of a workpiece stocker, the stocker comprising
- a chamber for storing a plurality of workpieces;
- a robotic mechanism to transfer the workpieces from the chamber to an IO station;
- and
- an emergency access port for accessing the workpieces in the event of the robotic failure, the emergency access port comprising
- a mating interface to a portable workpiece removal equipment,
- the method comprising
- mating the emergency access port to a portable workpiece removal equipment;
- removing the workpieces without exposing the workpieces to outside ambient.
Dependencies are inferred from the claim text.