Automated Sputtering Target Production and Sub Systems Thereof

A system for manufacturing a sputtering target, comprising:

• a robotic part handling sub system;
• an optional weighing sub system adapted to measure the weight of a pre-finished and/or finished sputtering target;
• a machining sub system adapted to finish machine a pre-finished sputtering target;
• a cleaning sub system adapted to clean a pre-finished sputtering target;
• an optional inspection sub system adapted to measure dimensions of a pre-finished and/or finished sputtering target;
• and
• a feedback control sub system adapted to provide control signals to one or more of the robotic part handling sub system, the weighing sub system, the cleaning sub system, and/or the inspection sub system to control processing performed by one or more of the sub systems.

A method of manufacturing a sputtering target, comprising:

• gripping a pre-finished sputtering target utilizing a robotic part handling apparatus;
• weighing the pre-finished sputtering target and comparing the actual weight of the part to an expected weight or a previously recorded weight, determining whether further processing of the part should be performed based on the results of comparing the actual weight to the expected weight;
• finish machining the part to desired dimensions;
• cleaning the finish machined part;
• and
• inspecting the finish machined part to determine conformance of the dimensions of the finish machined part with desired dimensions.

A system for manufacturing a workpiece, comprising:

• a robotic part handling sub system;
• an optional weighing sub system adapted to measure the weight of a pre-finished and/or finished workpiece;
• a machining sub system adapted to finish machine a pre-finished workpiece;
• a cleaning sub system adapted to clean a pre-finished workpiece;
• an optional inspection sub system adapted to measure dimensions of a pre-finished and/or finished workpiece;
• and
• a feedback control sub system adapted to provide control signals to one or more of the robotic part handling sub system, the weighing sub system, the cleaning sub system, and/or the inspection sub system to control processing performed by one or more of the sub systems.