Redundantable robot assembly for workpiece transfer
AssigneeDynamic Micro Systems
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.
Claims20
A redundantable workpiece transfer mechanism for semiconductor workpiece transfer, comprising
- at least two independent workpiece transfer assemblies,
- wherein each independent workpiece transfer assembly is capable of transfer the workpieces regardless of the operating status of other workpiece transfer assemblies.
A semiconductor equipment having workpiece movement, comprising two stations;
- a redundantable workpiece transfer mechanism comprising at least two independent workpiece transfer assemblies for transferring the workpieces between the stations,
- wherein each independent workpiece transfer assembly is capable of transfer the workpieces regardless of the operating status of other workpiece transfer assemblies;
- and
- a controller for providing a service zone around the workpiece transfer assembly for safe servicing an inoperative workpiece transfer assembly while other workpiece transfer assemblies still operating.
A semiconductor equipment having workpiece movement, comprising two stations;
- a redundantable workpiece transfer mechanism comprising at least two independent workpiece transfer assemblies for transferring the workpieces between the stations,
- wherein each independent workpiece transfer assembly is capable of transfer the workpieces regardless of the operating status of other workpiece transfer assemblies;
- and
- a controller for coordinating the transferring of the workpieces,
- wherein the controller recognizes the operating status of the workpiece transfer assemblies, and
- wherein the controller assigns the transferring of the workpieces to the operating workpiece transfer assemblies.
Dependencies are inferred from the claim text.