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US 2008/0078503 A1Published application
Mechanical pump operating well for a long term and method of manufacturing the same
AssigneesNational University Corporation Tohoku University, Foundation for Advancement of International Science
InventorsTadahiro OHMI, Isao Akutsu
Life of this patent
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Abstract
A mechanical pump of the present invention is applied to, for example, a screw pump A for exhausting a gas from a processing chamber. The screw pump comprises a gas-exposed region exposed to the gas and an yttria (Y2O3) film formed on the gas-exposed region.
Claims10
A mechanical pump for exhausting a gas and comprising a gas-exposed region exposed to the gas and an yttria film formed on said gas-exposed region.
Dependencies are inferred from the claim text.