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US 2008/0076849 A1Published application
Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device
AssigneeFUJIFILM Corporation
InventorsKenichiro SATO, Tsukasa YAMANAKA
Life of this patent
Estimating the term…
Abstract
A polybenzoxazole precursor is represented by the following formula (1): wherein R1a to R4a, R1b to R4b, X1, Y1 and m are defined in the specification.
Claims5
A polybenzoxazole precursor represented by the following formula (1):
- wherein R1a, R2a, R3a, R4a, R1b, R2b, R3b and R4b may be the same or different, each of them represents a hydrogen atom, an alkyl group, an alkoxy group, an alkynyl group, or an alicyclic group, at least one of R1a to R4a and at least one of R1b to R4b represent an alkynyl group, and the groups other than an alkenyl group of R1a to R4a and the groups other than an alkenyl group of R1b to R4b may be bonded to each other to form an alicyclic group;
- X1 represents a group represented by formula (2) or (3):
- X2 represents a divalent aromatic group, heterocyclic group, alicyclic group, or aliphatic group, each of which may contain a silicon atom;
- X3 represents a tetravalent aromatic group, aliphatic group, heterocyclic group, or mixed group thereof;
- Ra and Rb each independently represents a hydrogen atom, an alkyl group, an acyl group, SO2Rc, a group capable of leaving by the action of an acid, or —C(R3)2—COOR4;
- Rc represents an alkyl group, an aryl group, or an alicyclic group;
- R3 represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms;
- R4 represents a group capable of leaving by the action of an acid;
- Y1 represents a divalent aromatic group, aliphatic group, heterocyclic group, or mixed group thereof;
- each groups represented by X1, X2, X3, Y1, Ra, Rb, Rc, R3 and R4 may be the same or different;
- and
- m represents an integer of from 3 to 1,000.
9 more elements
A photosensitive resin composition comprising:
- a photosensitizer;
- and
- a polybenzoxazole precursor represented by the following formula (1):
- wherein R1a, R2a, R3a, R4a, R1b, R2b, R3b and R4b may be the same or different, each of them represents a hydrogen atom, an alkyl group, an alkoxy group, an alkynyl group, or an alicyclic group, at least one of R1a to R4a and at least one of R1b to R4b represent an alkynyl group, and the groups other than an alkenyl group of R1a to R4a and the groups other than an alkenyl group of R1b to R4b may be bonded to each other to form an alicyclic group;
- X1 represents a group represented by formula (2) or (3):
- X2 represents a divalent aromatic group, heterocyclic group, alicyclic group, or aliphatic group, each of which may contain a silicon atom;
- X3 represents a tetravalent aromatic group, aliphatic group, heterocyclic group, or mixed group thereof;
- Ra and Rb each independently represents a hydrogen atom, an alkyl group, an acyl group, SO2Rc, a group capable of leaving by the action of an acid, or —C(R3)2—COOR4;
- Rc represents an alkyl group, an aryl group, or an alicyclic group;
- R3 represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms;
- R4 represents a group capable of leaving by the action of an acid;
- Y1 represents a divalent aromatic group, aliphatic group, heterocyclic group, or mixed group thereof;
- each groups represented by X1, X2, X3, Y1, Ra, Rb, Rc, R3 and R4 may be the same or different;
- and
- m represents an integer of from 3 to 1,000.
12 more elements
Dependencies are inferred from the claim text.