Detection of diamond contamination in polishing pad and reconditioning system therefor

Abstract

Methods for reconditioning a polishing pad and detecting diamond contamination of the polishing pad are disclosed. In particular, the methods include the step of exposing the reconditioned polishing pad to an energy source to induce the diamond contamination to fluoresce. Detection of the diamond contamination is then made by detecting the fluorescence. Removal of the diamond contamination results in an improved reconditioned polishing pad. A reconditioning system for reconditioning a damaged polishing pad is also disclosed. The reconditioning system includes a reconditioning disk including a plurality of diamonds for reconditioning the polishing pad, wherein each diamond fluoresces when exposed to an energy source.

Dependencies are inferred from the claim text.