Method and Apparatus for Pattern Transfer, and Annular Recording Medium

An apparatus for transferring a pattern of minute structures by the use of a pair of press members located opposingly for movements toward and away from each other, one press member being adapted to support thereon a mold having on a transfer surface a master pattern of minute structures to be transferred, and the other press member being adapted to support thereon an annular substrate plate having a curable resin layer coated thereon and to press said resin layer against said transfer surface of said mold to transfer said minute structures thereto, characterized in that:

• said mold is provided with a center hole defining at least three small-diameter segments and three large-diameter segments alternately along an inner periphery of said transfer mold;
• said annular substrate plate is so formed as to have an inside diameter exactly matching with said small-diameter segments at the inner periphery of said mold;
• and
• a chuck mechanism is provided inside of said lower press member, said chuck mechanism having at least three chuck pawls located in spaced positions along inner periphery of said substrate plate, said chuck pawls being radially displaceable to take either an operative position in abutting engagement with inner periphery of said substrate plate or a receded position disengaged from said substrate plate;
• said chuck pawls of said chuck mechanism being adapted to grip both of said inner periphery of said substrate and said small-diameter segments of said center hole of said mold at the time of setting said substrate plate in aligned position relative to said mold, and to grip said inner periphery of said substrate plate alone, at a spaced position from a large-diameter segment of said center hole of said mold, at the time of separating said substrate plate from said mold.