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US 2008/0075136 A1Published application
System and method for the improvement of optical transmission efficiency in laser systems
OwnerVincent Vazquezinventor
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Abstract
Embodiments of the present invention provide a system and method for improving the optical transmission efficiency of laser systems and increasing the lifetime of laser system components. An embodiment of the present invention can include creating spent excimer laser gas in a laser cavity and directing the spent excimer laser gas to a volume at least partially in the optical path of a laser beam.
Claims33
A method comprising:
- creating spent excimer laser gas in a laser cavity;
- and
- directing the spent excimer laser gas to a volume at least partially in an optical path of a laser beam.
A laser system comprising:
- a laser configured to produce a laser beam, the laser comprising a laser cavity configured to contain a laser gas;
- the laser system defining a first volume at least partially in the optical path of the laser beam;
- and
- one or more valves fluidly coupled to the first volume and the laser cavity to selectively couple the laser cavity to the first volume.
1 more element
A method comprising:
- directing laser gas from a laser cavity of a laser system to a first volume at least partially in the optical path of a laser beam produced by the laser system;
- and
- sealing the laser gas in the first volume until a subsequent laser gas change.
Dependencies are inferred from the claim text.