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US 2008/0074771 A1Published application
Method for providing an anti-stiction coating on a metal surface
AssigneeHewlett-Packard Development Company, L.P.
InventorsPaul Felice Reboa, Kirby Sand
Life of this patent
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Abstract
A method for providing an anti-stiction coating on a metal surface includes reacting a vapor of perfluorooctylhydroxamic acid with the metal surface in a reaction chamber.
Claims20
A method for providing an anti-stiction coating on a metal surface, comprising reacting a vapor of perfluorooctylhydroxamic acid with the metal surface in a reaction chamber.
A device, comprising:
- a metal surface;
- and
- a perfluorooctylhydroxamic acid anti-stiction coating established on at least a portion of the metal surface.
Dependencies are inferred from the claim text.