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US 2008/0074473 A1Published application
Actuator device, liquid-jet head and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorsMotoki Takabe, Koji Sumi, Motohisa Noguchi, Naoto Yokoyama, Takeshi Saito
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Abstract
Disclosed is an actuator device that includes a piezoelectric element provided as being freely displaceable on a substrate. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode. In the actuator device, the Young's modulus of the lower electrode is not less than 200 GPa.
Claims9
An actuator device comprising a piezoelectric element provided as being freely displaceable on a substrate, the piezoelectric element including a lower electrode, a piezoelectric layer and an upper electrode,
- wherein the Young's modulus of the lower electrode is not less than 200 GPa.
Dependencies are inferred from the claim text.