Micro-electromechanical device
AssigneeKabushiki Kaisha Toshiba
InventorsTakashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
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Abstract
A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.
Claims14
A micro-electromechanical device, comprising:
- a first piezoelectric actuator including a first beam and a second beam, the second beam extending parallel to the first beam, a first fixed end positioned at an end of the first beam, a first connecting end positioned at another end of the first beam, a first working end positioned at an end of the second beam opposite to the first connecting end where another end of the second beam is located, the first fixed end fixed on a substrate;
- and
- a second piezoelectric actuator including a third beam spaced from the first beam and a fourth beam extending parallel to the third beam, a second fixed end positioned at an end of the third beam, a second connecting end positioned at another end of the third beam, a second working end positioned at an end of the fourth beam opposite to the second connecting end where another end of the fourth beam is located, the second fixed end fixed on the substrate, the second working end facing the first working end in a perpendicular direction to a surface of the substrate.
Dependencies are inferred from the claim text.