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US 2008/0074005 A1Published application
Piezoelectric thin film device and method for manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsKenya SANO, Ryoichi Ohara, Naoko Yanase, Takaaki Yasumoto, Kazuhiko Itaya, Takashi Kawakubo, Hiroshi Toyoda, Masahiko Hasunuma, Toshihiko Nagano, Kazuhide Abe, Michihiko Nishigaki, Hironobu Shibata
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Abstract
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
Claims7
A piezoelectric thin film device, comprising:
- a piezoelectric actuator having a fixed end and a working end, the fixed end fixed on a substrate, the working end projecting into a free space, the piezoelectric actuator includes,
- a bottom electrode of an amorphous metal film disposed above a substrate,
- a piezoelectric film disposed above the amorphous metal, wherein a crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal,
- a top electrode facing the bottom electrode so as to sandwich the piezoelectric film with the bottom electrode, and
- a supporting film provided on a surface of the top electrode, and
- a fixed electrode provided on a surface of the substrate so as to face the working end.
3 more elements
Dependencies are inferred from the claim text.