Semiconductor memory device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsOsamu Hidaka, Iwao Kunishima, Hiroyuki Kanaya
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AssigneeKabushiki Kaisha Toshiba
InventorsOsamu Hidaka, Iwao Kunishima, Hiroyuki Kanaya
Estimating the term…
A semiconductor memory device includes a semiconductor substrate having a first region and a second region, a transistor placed in the first region of the semiconductor substrate, a first insulating film formed on the semiconductor substrate in the first and second regions and on the transistor, a first ferroelectric capacitor formed on the first insulating film in the first region and electrically connected to the transistor, a hydrogen barrier film formed above the first ferroelectric capacitor and above the first insulating film in the first and second regions, a first contact penetrating the hydrogen barrier film in the first region and electrically connected to the first ferroelectric capacitor, and a second contact which penetrates the hydrogen barrier film in the second region and which is in a floating state.
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2-20. (canceled)